Mark Oskotsky, President

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Mr. Oskotsky has more than thirty years progressive experience in Optical Design, Optical Engineering, Optical Manufacturing and Metrology, research and development, management and training. He holds more than 30 patents and published numerous papers in a field of Optical Engineering. Most of his developments have been patented. Also, Mr. Oskotsky has developed designs, breadboards, prototypes and production of the optics for Optical Lithography Projection Optics and Illumination Systems, wafer inspection lenses and others.

As Optical Design Department Director at SVGL-ASML, Mr. Oskotsky was responsible for managing Optical Design and Optical Analysis activities, metrology and production support of all ASML-SVGL Micrascan tools. He generated project proposals to assist in overall SVGL-ASML management in planning, scheduling and budget control.

Mr. Oskotsky was Principal Optical Designer of MSII, MSIII, MS193, MSV and MSVII Illumination Systems, Principal Optical Designer of ASML AT1400 and AT1600 lithography systems; he managed concept development and optical design and analysis of Maskless Lithographic Tool. He was responsible for metrology and alignment systems optical design, analysis and production support.

Mr. Oskotsky was responsible for the interaction with customers, business plan development and made a numerous presentations to TSMC, IBM, Intel and other major semiconductor companies on new advanced generations of lithography tools. Mr. Oskotsky duties also included system analysis, specification development and interfacing with customers.

In FLIR Systems, Inc. Mr. Oskotsky was responsible for the Optical design and Optical Analysis activities, production and development support. He was a leading Optical designer of FLIR IR optical systems for military applications. Mr. Oskotsky successfully completed optical design and fabrication support on an accelerated schedule of a Compact FLIR for Israel Aircraft Industries Ltd. and he was Principal Optical Designer of FLIR for McDonnell Douglas Electronic Systems Co.

Mr. Oskotsky holds more than 30 patents and has numerous technical publications on Optical Design & Optical Engineering.

Products for which he has managed optical design and analysis and has been principal optical designer include:

  • Hyperspectral Optics for Airborne Remote Sensors
  • Visible, VNIR, SWIR, MWIR and LWIR optics
  • Orthoscopic, apochromatic and athermalized lenses for airborne applications.
  • Maskless Lithography tool.
  • Step & Scan 248nm 0.5 NA Lithography tool.
  • Step & Scan 248nm 0.6 NA Lithography tool.
  • Step & Scan 193nm 0.75 NA Lithography tool.
  • Step & Scan 157nm 0.75 NA Lithography tool.
  • Step & Scan 193nm 0.85 NA Lithography tool.
  • Step & Scan 157nm 0.85 NA Lithography tool.
  • New generation of 8" Micralign Lithography tool.
  • Zoom lens, wide field of view LCD projectors.
  • FLIR zoomable systems.
  • High Speed IR lenses for wafer inspection microscope.
  • Design and development of plano-apochromatic zoom microscopes for biological research. Illumination systems design.
  • Design and development of high uniformity illumination telecentric systems for all generations of lithographic Step & Scan systems.
  • TV portable camera zoom lenses.
  • Space telescopes.
  • Projection TV systems.
  • Devices for plasma generation.
  • Wide angle large zoom FLIRs.
  • Variety of precise angular and linear measuring optical systems.
  • Metrological devices: interferometers, null tests setups, birefringence and homogeneity measurement systems.


Professional Experience

2002-Present President, Optical Design Associates, Inc., Stamford, CT
1995-2002 Optical Design Department Director, ASML US Holding, Wilton, CT
1993-2001 Consulting Engineer, SVGL Systems, Inc. Wilton, CT
1991-1995 Senior Staff Engineer/Optical Design, SVGL Systems, Inc. Wilton, CT
1990-1991 Leading Optical Designer, FLIR systems, Inc. Portland, OR
1973-1990 Optical Design Group Leader, St. Petersburg Opto-Mechanical Corporation, Russia

Education

1975 M.S. Degree in Optical Engineering & Optical Design, University of St. Petersburg, Russia
1973 B.S. Degree in Optical Engineering & Optical Design, University of St. Petersburg, Russia

Lev Sakin, Chief Technical Officer

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Mr. Sakin has more than thirty years progressive experience in Optical Design, Optical Engineering, Optical Manufacturing and Metrology, research and development, management and training. He holds more than 10 patents and published numerous papers in a field of Optical Engineering.

As Chief Technical Officer at Optical Design Associates he is responsible for successful development and implementation of all projects including low and high end lithography machines, near and far infrared devices, ophthalmological systems, telescopical systems, and others. These responsibilities included technical development and oversee of all production and metrology stages.

As Senior Project Leader at ASML, Mr. Sakin was leading a team of optical designers in both imaging and illumination optics, providing state-of-the-art optical system development. He had full responsibility for all aspects of optical design at ASML and was heavily involved in the Maskless Tool Project and Flat Panel Display Project.

Prior to entering management, he was a leading optical designer of optical systems for all generations of Micrascan lithography machines and the X-ray lithography machine. In this role, his responsibilities have included: system engineering, (i.e., transforming the scenario into an appropriate set of optical system specifications), conceptual and detailed optical design, in-depth computer modeling of the optical system to support performance prediction, error budget derivation, flowdown and piece part tolerance allocation, assembly/test procedure development and implementation, acceptance test plan development, acting as interface between design engineers and assembly technicians, and development and presentation of all optical information to the customer from proposal through final design review.

Optical systems and projects for which he has been the principal designer and consultant include:
  • optical design and analysis of catadioptric Projection Optics systems for 248 nm, 193 nm and 157 nm step-and scan High NA lithographic machines
  • null correctors designs for all generations of High NA step-and scan machines
  • close cooperation with the optical manufacturing departments
  • optical design of advanced checkerboard concept alignment system for the first generation of X-ray lithography machine
  • optical design of catadioptric Projection Optics and Illumination system for Maskless lithography machine utilizing Spatial Light Modulator pattern generator
  • two and four mirror optical designs of Projection Optics for 54" and 62" Flat Panel Display machines
  • optical design of different magnifications High Speed IR lenses for wafer inspection microscope
  • design of wide zoom range centering alignment collimator
  • design of a variety of high contrast projection lenses for LCD High Intensity projectors
  • large working distance zoom lens design for zoom projector
  • 10x, 20x and 50x High Speed Telecentric Retrotelefocus Orthoscopic lenses for Optical Comparators
  • design and development of high contrast and small distortion Scanning Laser Ophthalmoscope
  • design and development of new generation of high resolution colonoscopy endoscopes
  • design of complete line of plano-apochromatic objectives for biological microscopes
  • design of variety of precise angular and linear measuring optical systems
  • large field of view design of variety of optical magnifiers
  • conceptual analysis and design of laser deep UV interferometers


Professional Experience

2002-Present Chief Technical Officer, Optical Design Associates, Inc., Stamford, CT
2001-2002 Senior Project Leader, ASML US Holding
1995-2001 Principal Engineer, SVG, Inc.
1992-1995 Senior Staff Engineer/Optical Design, SVG, Inc.
1990-1992 Senior Engineer/Optical Design, General Scientific Corporation
1985-1990 Lead Optical Design Engineer, St.Petersburg Opto-Mechanical Corporation, Russia
1980-1985 Senior Optical Design Engineer, St.Petersburg Opto-Mechanical Corporation, Russia
1975-1980 Optical Design Engineer, St.Petersburg Opto-Mechanical Corporation, Russia

Education

1975 M.S. Degree in Optical Engineering, University of St.Petersburg, Russia
1973 B.S. Degree in Optical Engineering, University of St.Petersburg, Russia